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Photon-emission Electron Microscope — PEM

Photon-emission Electron Microscope — PEM



Photon Emission Microscopy PEM is a highly reliable technique for fault localisation especially for the Failure Analysis of Intergated Ciruits, IC. PEM consists of a high sensitive CCD detector capable of detecting photons.  These photons are emitted when an electron-hole pair recombines in affected zone.  This technique is often coupled with Optical Beam Induced Resistance Change (OBIRCH) for effective fault locating.

Photon Emission Microscopy is suitable for :

  • Determination of Leakage Currents
  • Inspection for ESD Failures
  • Detection of Junction Leakages
  • Measurement of Gate-Oxide Defectives



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