Description
Auger electron spectroscopy (AES) is a common chemical surface analysis method. It measures the chemical composition of the outermost 100 Å of specimen and all elements except for H and He can be detected. AES is working on the principle of excitation of atoms by electron beam that leads to the emission of Auger electrons.
Auger electron spectroscopy is a very useful tool in Failure Analysis for elemental analysis of miniature surface features. Some of the applications below:
| • Qualitative analysis through fingerprinting spectral analysis |
| • Identification of different chemical states of elements |
| • Determination of atomic concentration of elements |
| • Depth profiling |
| • Adsorption and chemisorption of gases on metal surfaces |
| • A Interface analysis of materials deposited in situ on surfaces |
Our analysis method is accordance to international standard:
ASTM E827-08 (Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy)
